Cursussyllabus
Find here the course content, and link to the slides
- CH01: Scaling and Photo-lithography
- CH02: Introduction to the concepts of semiconductor process
- CH03: Photodiode
- CH04: Impurity Doping
- CH05: Operation of a MOSFET
- CH06: Etching techniques
- CH07: FEOL CMOS integration flow (~45nm node), including detailed modules
- CH08: Material Formation
- CH09: MOL/ BEOL CMOS integration
- CH10: Epitaxy and advanced fabrication techniques
- CH11: Environmental aspect of semiconductor processing
In addition, here is the reference syllabus from Gent university
Cursusoverzicht:
| Datum | Details | Inleverdatum |
|---|---|---|